![]() Khuri-Yakub Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.) Expired - Lifetime Application number US08/327,210 Inventor Matthew I. Google Patents Electrostatic ultrasonic transducerÄownload PDF Info Publication number US5619476A US5619476A US08/327,210 US32721094A US5619476A US 5619476 A US5619476 A US 5619476A US 32721094 A US32721094 A US 32721094A US 5619476 A US5619476 A US 5619476A Authority US United States Prior art keywords layer ultrasonic transducer substrate membrane transducer Prior art date Legal status (The legal status is an assumption and is not a legal conclusion. Google Patents US5619476A - Electrostatic ultrasonic transducer ![]() US5619476A - Electrostatic ultrasonic transducer ![]()
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